Business Details
43 Years
experience
Custom Wet Process Equipment for Semiconductor Manufacturing
Wafer Process Systems has been a trusted leader in wet process equipment manufacturing since 1983. Founded by Douglas H. Caldwell, our company originated as a service-focused organization addressing critical needs in semiconductor wet bench maintenance and modifications. Over four decades, we've evolved into a global supplier of precision-engineered wet benches, chemical blend systems, and patented IPA drying technology. Our engineering team brings deep industry expertise from prior roles at Semifab Inc. and Santa Clara Plastics, combining hands-on experience with innovative design capabilities. We specialize in both new equipment manufacturing and field modifications that eliminate costly facility disruptions. Our patented Liquid Diffusion Technology (LDT) for IPA dryers represents our commitment to advancing particle-neutral drying solutions.With comprehensive support including spare parts cross-referencing and contract manufacturing services, we ensure long-term equipment viability even when original manufacturers no longer exist. Our technical proficiency spans semiconductor, MEMS, photovoltaic, and biomedical applications, serving clients worldwide from our San Jose headquarters. Our track record of continuous improvement and customer-centric approach has established us as an authoritative partner in critical manufacturing processes. This enduring reputation is built on verifiable experience, technical expertise, and unwavering commitment to client success.
Services
Wet Benches
Chemical Blend Systems
IPA Dryers
Custom Fabrication
Field Modifications
Details
- Year established: 1983
Highlights and features
- We have 40+ years of specialized experience in semiconductor wet process equipment
- Our patented LDT drying technology ensures particle-neutral wafer processing
- We provide field modifications that eliminate facility disruption costs
- We offer comprehensive spare parts support for legacy equipment
- Our engineering team has direct industry experience from leading manufacturers
Services
Wet Benches
We manufacture manual, semi-automated, and fully automated wet benches for semiconductor manufacturing. These precision systems handle chemical treatments, cleaning processes, and etching applications with strict contamination control. Our equipment supports surface prep cleaning, oxide etching, and metal deposition processes in Class 10 cleanroom environments.
Chemical Blend Systems
Our chemical blend systems deliver precise chemical formulations for semiconductor processing. These systems provide controlled dispensing of cleaning solutions, etchants, and stripping agents with customizable parameters. They support applications including resist removal, metal etching, and electroless deposition across multiple advanced manufacturing sectors.
IPA Dryers
We produce patented IPA drying systems using Liquid Diffusion Technology. This innovative approach creates microdroplets through a Venturi Aerosol system without heating IPA, reducing safety risks. The technology maintains particle neutrality during wafer drying, with optional Megasonic enhancement for critical cleaning applications.
Field Modifications
Our field modification services adapt existing equipment to new process requirements without facility disruption. We implement safety upgrades, process changes, and performance enhancements on-site. This approach eliminates removal/installation costs while extending equipment lifecycle for semiconductor manufacturing clients.
Custom Fabrication
We provide custom fabrication services for critical semiconductor manufacturing components. This includes PFA Teflon welding, tank construction, and equipment weldments. Our capabilities support specialized requirements in quartz cleaning, substrate preparation, and precision parts manufacturing for advanced technology applications.
People
Douglas H. Caldwell
President & CEO
Founded Wafer Process Systems in 1983 after 4 years at Semifab Inc. and prior experience at Microair, Inc. Brings extensive expertise in wet process equipment service and modifications from his career in semiconductor manufacturing support.
Christopher J. Schmitz
Vice President, Engineering
Joined Wafer Process Systems in 1983 after 3 years in Semifab Inc.'s engineering department. Specializes in wet chemical process equipment design with prior experience at Santa Clara Plastics Inc. Leads engineering team in developing precision manufacturing solutions.
Stuart H. Lebherz
Customer Service Manager
Manages client relationships and support operations. Coordinates technical assistance and service delivery for global clients. Ensures customer satisfaction through responsive support and process expertise.
Barbara C. Caldwell
CFO & Vice President, Administration
Oversees financial operations and administrative functions. Manages company resources and strategic planning. Provides leadership in business administration and operational support.
Questions
What industries does Wafer Process Systems serve?
We serve semiconductor, MEMS, photovoltaic, biomedical, and flat panel display manufacturing industries with specialized wet process equipment since 1983.
What makes your IPA dryers unique?
Our patented Liquid Diffusion Technology (LDT) uses a Venturi Aerosol system without heating IPA, providing particle-neutral drying with optional Megasonic enhancement for critical applications.
Can you modify existing wet process equipment?
Yes, we perform in-field modifications to existing equipment for process changes or upgrades, eliminating facility disruption costs associated with equipment replacement.
Do you support legacy equipment from other manufacturers?
We provide comprehensive support including spare parts cross-referencing and equipment maintenance for legacy systems when original manufacturers are no longer available.
What customization options are available?
We offer custom wet process systems tailored to specific requirements, including specialized chemical blend systems, IPA dryer configurations, and precision fabrication of critical components.
